Micromachined terahertz systems – a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum.

February, 2015 to January, 2018
Horizon 2020

M3TERA (link), a European cooperative research project, officially started on 1st February 2015 with a set duration of 36 months. It receives funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement n° 644039 (Announcement Letter).


The Mission:

The mission of the M3TERA project is to provide a wide-spread use of low cost-THz technology in our society, enabled by a micromachined heterogeneous integration platform, which provides an unique way to highly-integrated, volume – manufacturable, cost- and energy-efficient, reconfigurable submillimeter-wave and THz systems.



The primary objective of M3TERA is to develop a heterogeneous microsystem integration platform which facilitates high volume manufacturing of compact, reliable, energy-efficient and advanced-performance millimetre-wave and THz systems at drastically reduced costs. For this purpose the suggested THz platform goes substantially beyond the state of the art trough innovative concepts in multiple domains of the system such as silicon-micromachined THz integration platform, wafer-scale integrated micromechanically-tuneable THz front-end components, heterogeneously-integrated millimetre-wave active circuits, novel low-loss signal and sensor interfaces tailor-made for THz frequencies.

This primary objective is accompanied by 3 further key aims:

  • Primary technology prototype
  • Developing a system-in-package concept
  • Enabling a manufacturable and efficient technology transfer


The concrete business and lead application case is THz microsystems enabling compact, low-cost point-to-point high-speed communication links in the frequency space between 100 GHz and 500 GHz, to be deployed in a scenario of a high-density small-cell base-station network providing ubiquitous high-speed internet access to mobile communication devices in urban environment.

 A secondary prototype developed in M3TERA is on a multi-function adaptive THz sensor platform for different millimeter-wave sensing applications in society including:

  • food quality control,
  • food safety monitoring,
  • medical diagnosis, and
  • industrial sensing.



The M3TERA consortium is well-positioned to achieve its objectives by bringing together a European team of leading industrial and research companies. These 7 project partners from 4 different countries form a complete chain stretching from basic research and service design, via applied research, up to end-user oriented service providers. The M3TERA consortium is formed by the following partners:

  • Technikon Forschungs- und Planungsgesellschaft mbH, Austria
  • Kungliga Tekniska Hoegskolan, Sweden
  • Infineon Technologies Austria AG, Austria
  • Ericsson AB, Sweden
  • Anteral SL, Spain
  • Chalmers Tekniska Hoegskola AB, Sweden
  • CSEM Centre Suisse D’Electronique et de microtechnique SA – recherche et developpment, Switzerland


PDF leaflet

Our Clients

Back to Top